Invention Grant
- Patent Title: High performance floating body VFET with dielectric core
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Application No.: US17315958Application Date: 2021-05-10
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Publication No.: US11769831B2Publication Date: 2023-09-26
- Inventor: H. Jim Fulford , Mark I. Gardner
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/092 ; H01L29/66 ; H01L21/8238 ; H01L23/522

Abstract:
Aspects of the present disclosure provide a floating body vertical field effect transistor with dielectric core and a method for fabricating the same. The floating body vertical field effect transistor can include a first semiconductor device including sidewall structures of a first gate metal sandwiched by dielectric layers, a first epitaxially grown channel surrounded by the sidewall structures and can include a second semiconductor device formed on the same substrate adjacent to the first semiconductor device; a salicide layer or doped layer formed between the first and second semiconductor devices and metallization contacting each of the S/D regions and the gate regions. The floating body vertical field effect transistor may include a P+ epitaxially grown channel formed on the same substrate adjacent to an N+ epitaxially grown channel, the P+ epitaxially grown channel separated from N+ epitaxially grown channel by a diffusion break.
Public/Granted literature
- US20220102552A1 HIGH PERFORMANCE FLOATING BODY VFET WITH DIELECTRIC CORE Public/Granted day:2022-03-31
Information query
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