Invention Grant
- Patent Title: Ligand-modified filter and methods for reducing metals from liquid compositions
-
Application No.: US17184273Application Date: 2021-02-24
-
Publication No.: US11772055B2Publication Date: 2023-10-03
- Inventor: James Hamzik , Jad A. Jaber , Nicholas J. Filipancic , Justin Brewster
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: B01D69/12
- IPC: B01D69/12 ; B01D71/26 ; B01D71/36 ; B01D71/58 ; C02F101/20 ; C02F101/22 ; C02F103/34 ; C02F1/44 ; C07C229/16 ; C08F255/02 ; C08F259/08
Abstract:
Described are filter materials having polycarboxyl ligands, such as iminodiacetic acid, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter various fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.
Public/Granted literature
- US20210260537A1 LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS Public/Granted day:2021-08-26
Information query
