Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17205462Application Date: 2021-03-18
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Publication No.: US11776909B2Publication Date: 2023-10-03
- Inventor: Eunjung Kim , Hui-Jung Kim , Keunnam Kim , Daeik Kim , Bong-soo Kim , Yoosang Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR 20160100899 2016.08.08 KR 20160136009 2016.10.19
- Main IPC: H01L21/764
- IPC: H01L21/764 ; H01L23/532 ; H10B12/00 ; H01L23/522 ; H01L23/528 ; H10B63/00

Abstract:
A semiconductor memory device includes word lines extending in a first direction on a semiconductor substrate, bit line structures crossing over the word lines and extending in a second direction intersecting the first direction, and contact pad structures between the word lines and between the bit line structures in plan view. A spacer structure extends between the bit line structures and the contact pad structures. The spacer structure includes a first air gap extending in the second direction along sidewalls of the bit line structures and a second air gap surrounding each of the contact pad structures and coupled to the first air gap.
Public/Granted literature
- US20210210432A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-07-08
Information query
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