- 专利标题: Method and system for controlling lot risk score based dynamic lot measurement on basis of equipment reliability index
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申请号: US16622097申请日: 2018-05-25
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公开(公告)号: US11782432B2公开(公告)日: 2023-10-10
- 发明人: Tae Young Hong , Jin Woo Park
- 申请人: SK HOLDINGS CO., LTD.
- 申请人地址: KR Seoul
- 专利权人: SK HOLDINGS CO., LTD.
- 当前专利权人: SK HOLDINGS CO., LTD.
- 当前专利权人地址: KR Seoul
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR 20170074579 2017.06.14
- 国际申请: PCT/KR2018/005943 2018.05.25
- 国际公布: WO2018/230853A 2018.12.20
- 进入国家日期: 2019-12-12
- 主分类号: G05B23/02
- IPC分类号: G05B23/02 ; G05B19/4065 ; G01R31/26 ; H01L21/67 ; H01L21/02
摘要:
A method and a system for controlling a lot risk score based dynamic lot measurement on the basis of equipment reliability index are provided. The method for controlling a measurement, according to an embodiment of the present invention, calculates an equipment reliability index of specific equipment for a specific process in semiconductor manufacturing, calculates a risk score of the specific equipment for the specific process on the basis of an equipment reliability index, and determines, on the basis of the risk score, whether to measure a semiconductor product processed by the specific equipment for the specific process. Therefore, differential quality monitoring and management is possible according to the equipment reliability index, a measuring instrument can be efficiently used, quality and yield can be improved through timely measurement, and management convenience can be increased through automatic and dynamic lot measurement control.
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