Method and system for controlling lot risk score based dynamic lot measurement on basis of equipment reliability index
摘要:
A method and a system for controlling a lot risk score based dynamic lot measurement on the basis of equipment reliability index are provided. The method for controlling a measurement, according to an embodiment of the present invention, calculates an equipment reliability index of specific equipment for a specific process in semiconductor manufacturing, calculates a risk score of the specific equipment for the specific process on the basis of an equipment reliability index, and determines, on the basis of the risk score, whether to measure a semiconductor product processed by the specific equipment for the specific process. Therefore, differential quality monitoring and management is possible according to the equipment reliability index, a measuring instrument can be efficiently used, quality and yield can be improved through timely measurement, and management convenience can be increased through automatic and dynamic lot measurement control.
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