Invention Grant
- Patent Title: MOS(metal oxide silicon) controlled thyristor device
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Application No.: US17792070Application Date: 2021-06-10
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Publication No.: US11784247B2Publication Date: 2023-10-10
- Inventor: Kun Sik Park , Jong Il Won , Doo Hyung Cho , Dong Yun Jung , Hyun Gyu Jang
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR 20200070547 2020.06.10 KR 20210074890 2021.06.09
- International Application: PCT/KR2021/007261 2021.06.10
- International Announcement: WO2021/251764A 2021.12.16
- Date entered country: 2022-07-11
- Main IPC: H01L29/745
- IPC: H01L29/745 ; H01L29/08 ; H01L29/10 ; H01L29/66

Abstract:
A MOS controlled thyristor device according to the concept of the present invention includes a substrate comprising a first surface and a second surface, which face each other, gate patterns disposed on the first surface, a cathode electrode configured to cover the gate patterns, and an anode electrode disposed on the second surface, The substrate includes a lower emitter layer having a first conductive type, a lower base layer having a second conductive type on the lower emitter layer, an upper base region provided in an upper portion of the lower emitter layer and having a first conductive type, wherein the upper base region is configured to expose a portion of a top surface of the lower base layer, an upper emitter region having a second conductive type and provided in an upper portion of the upper base region, a first doped region having a first conductive type and a second doped region surrounded by the first doped region and having a second conductive type, wherein the first and second doped regions are provided in an upper portion of the upper emitter region, and a first doping pattern having a first conductive type, which is provided on one surface of the upper portion of the upper emitter region. The first doping pattern is interposed between the upper base region and the first doped region along a first direction parallel to the top surface of the substrate. The first doping pattern is configured to expose a top surface of the upper emitter region on the other surface of the upper portion of the upper emitter region. Each of the gate patterns is configured to cover portions of an exposed top surface of the lower base layer, an exposed top surface of the upper base layer, an exposed top surface of the upper emitter region, a top surface of the first doping pattern, and a top surface of the first doped region. The cathode electrode is configured to cover portions of top and side surfaces of the gate pattern, a top surface of the second doped region, and a top surface of the first doped region. The first conductive type and the second conductive type are different from each other.
Public/Granted literature
- US20230087416A1 MOS(METAL OXIDE SILICON) CONTROLLED THYRISTOR DEVICE Public/Granted day:2023-03-23
Information query
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