Invention Grant
- Patent Title: Vibrator device, manufacturing method of vibrator device, electronic device, and vehicle
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Application No.: US16551137Application Date: 2019-08-26
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Publication No.: US11784632B2Publication Date: 2023-10-10
- Inventor: Takashi Yamazaki , Osamu Kawauchi , Akihiko Ebina
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: WORKMAN NYDEGGER
- Priority: JP 18158072 2018.08.27
- Main IPC: H03H9/205
- IPC: H03H9/205 ; H03H9/05 ; H03H9/10 ; B23K26/362 ; H03H3/04 ; H03H9/15 ; H03H3/02
Abstract:
A vibrator device includes: a base; a vibrator disposed in the base; and a lid including a substrate having a light transmitting property and a silicon substrate joined to the substrate and a part of the base surrounding the vibrator.
Public/Granted literature
- US20200067484A1 VIBRATOR DEVICE, MANUFACTURING METHOD OF VIBRATOR DEVICE, ELECTRONIC DEVICE, AND VEHICLE Public/Granted day:2020-02-27
Information query
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