公开(公告)号：US09748921B2

公开(公告)日：2017-08-29

申请号：US14721441

申请日：2015-05-26

Applicant: Seiko Epson Corporation

Inventor： Takashi Yamazaki ,  Masahiro Ishii

IPC: H03H9/21 ,  H03H9/10 ,  H03H3/02

CPC classification number: H03H9/21 ,  H03H9/1035 ,  H03H2003/026

Abstract: A vibrator (electronic device) includes: a vibrator element including vibrating arms; a base portion supporting the vibrator element and having a rectangular shape in a plan view; and a lid provided on the side of the vibrator element opposite to the base portion 3. Extending directions of long and short sides of the base portion and an extending direction of the vibrating arms cross each other. When an angle formed by the vibrating arms and a Y-axis direction is θ, the angle θ is more than 0° and less than 90°.

公开(公告)号：US11292341B2

公开(公告)日：2022-04-05

申请号：US16857310

申请日：2020-04-24

Applicant: Seiko Epson Corporation

Inventor： Junichi Takeuchi ,  Akira Mizuguchi ,  Akihiko Ebina ,  Takashi Yamazaki

IPC: B60K35/00 ,  G10K9/12

Abstract: A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate and the lid, and a thermistor element disposed at the base substrate.

公开(公告)号：US10756670B2

公开(公告)日：2020-08-25

申请号：US15829616

申请日：2017-12-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi Yamazaki

IPC: H03H9/02 ,  H03B5/04 ,  H03B5/32 ,  H01L41/16 ,  H01L41/09 ,  H01L41/083 ,  H03H9/24 ,  H03H9/05 ,  H03H3/007

Abstract: A resonator includes a surface silicon layer as a base material, a first silicon oxide layer disposed on a first surface of the surface silicon layer, and a second silicon oxide layer disposed on the opposite side to the surface silicon layer of the first silicon oxide layer, wherein when the thickness of the surface silicon layer is represented by tsi, the thickness of the first silicon oxide layer is represented by ta, and the thickness of the second silicon oxide layer is represented by tb, the following relationships are satisfied: 0.138×tsi

公开(公告)号：US09461615B2

公开(公告)日：2016-10-04

申请号：US14330184

申请日：2014-07-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi Yamazaki ,  Akihiko Ebina ,  Tsuyoshi Tabata ,  Hidekazu Yanagisawa

IPC: H03B5/32 ,  H01L41/047 ,  H03H9/17 ,  H03H9/21 ,  H03H9/10 ,  H01L41/09

CPC classification number: H03H9/17 ,  H01L41/0472 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/094 ,  H03B5/32 ,  H03H9/1014 ,  H03H9/21

Abstract: A vibrator element includes a base portion, a vibrating arm extending from the base portion, a first electrode provided on the vibrating arm, a second electrode provided above the first electrode, a piezoelectric body arranged between the first electrode and the second electrode, and an insulating film arranged between the first electrode and the piezoelectric body, in which the material of the first electrode contains TiN, the material of the insulating film contains SiO2, and the material of the piezoelectric body contains AlN.

Abstract translation: 振动元件包括基部，从基部延伸的振动臂，设置在振动臂上的第一电极，设置在第一电极上方的第二电极，布置在第一电极和第二电极之间的压电体， 布置在第一电极和压电体之间的绝缘膜，其中第一电极的材料含有TiN，绝缘膜的材料含有SiO 2，并且压电体的材料含有AlN。

公开(公告)号：US10416231B2

公开(公告)日：2019-09-17

申请号：US15558771

申请日：2016-02-03

Applicant: Seiko Epson Corporation

Inventor： Daisuke Kirihara ,  Masami Maeda ,  Toshioki Shimojima ,  Takashi Yamazaki

IPC: G01R31/28 ,  H01L21/673 ,  H01L21/67

Abstract: An electronic component transport apparatus includes: an openable and closable first opening and closing portion; a first rotation support portion which supports the first opening and closing portion to be rotatable; a second opening and closing portion provided to be openable and closable in the first opening and closing portion; and a second rotation support portion which supports the second opening and closing portion to be rotatable. An area of the first opening and closing portion is greater than an area of the second opening and closing portion.

公开(公告)号：US09461617B2

公开(公告)日：2016-10-04

申请号：US14727215

申请日：2015-06-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi Yamazaki ,  Osamu Iwamoto

IPC: H03B5/32 ,  H01L41/18 ,  H01L41/37 ,  H03H9/17 ,  C22C21/12 ,  C23C14/06 ,  C23C14/34 ,  H01L41/09 ,  H01L41/187

CPC classification number: H03H9/171 ,  C22C21/12 ,  C23C14/06 ,  C23C14/0688 ,  C23C14/3414 ,  H01L41/094 ,  H01L41/18 ,  H01L41/187 ,  H01L41/37 ,  H03B5/32

Abstract: A vibrator element includes: a base portion; and a vibrating arm extending from the base portion, the vibrating arm including a piezoelectric film that contains Cu at a crystal grain boundary.

Abstract translation: 振动元件包括：基部; 以及从所述基部延伸的振动臂，所述振动臂包括在晶界处含有Cu的压电膜。

公开(公告)号：US12255619B2

公开(公告)日：2025-03-18

申请号：US18446074

申请日：2023-08-08

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro Ogura ,  Keiichi Yamaguchi ,  Masahiro Oshio ,  Takashi Yamazaki

IPC: H03H9/21 ,  G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01C19/5656 ,  G01C19/5663 ,  H03H3/02 ,  H03H3/04 ,  H03H9/05 ,  H03H9/10

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US11784632B2

公开(公告)日：2023-10-10

申请号：US16551137

申请日：2019-08-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi Yamazaki ,  Osamu Kawauchi ,  Akihiko Ebina

IPC: H03H9/205 ,  H03H9/05 ,  H03H9/10 ,  B23K26/362 ,  H03H3/04 ,  H03H9/15 ,  H03H3/02

CPC classification number: H03H9/205 ,  B23K26/362 ,  H03H3/04 ,  H03H9/0595 ,  H03H9/1014 ,  H03H2003/027 ,  H03H2003/0457 ,  H03H2009/155

Abstract: A vibrator device includes: a base; a vibrator disposed in the base; and a lid including a substrate having a light transmitting property and a silicon substrate joined to the substrate and a part of the base surrounding the vibrator.

公开(公告)号：US11595026B2

公开(公告)日：2023-02-28

申请号：US17243632

申请日：2021-04-29

Applicant: Seiko Epson Corporation

Inventor： Seiichiro Ogura ,  Keiichi Yamaguchi ,  Masahiro Oshio ,  Takashi Yamazaki

IPC: G01C19/5607 ,  G01C19/5621 ,  H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  H03H3/04 ,  H03H9/10

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US09628046B2

公开(公告)日：2017-04-18

申请号：US14541759

申请日：2014-11-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Akinori Yamada ,  Takashi Yamazaki

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/21 ,  H03H9/15 ,  H03H3/04 ,  H03B5/32 ,  G01L1/10 ,  H03H9/215

CPC classification number: H03H9/02157 ,  G01L1/106 ,  H03B5/32 ,  H03H3/04 ,  H03H9/0509 ,  H03H9/0547 ,  H03H9/15 ,  H03H9/21 ,  H03H9/215

Abstract: A resonator element includes a resonator blank having a base portion, a vibrating arm, a linking portion, and a connecting portion connects the base portion and the linking portion to each other, in which, when a thickness of the resonator blank is set to T, a width of the base portion is set to W1, and a width of the connecting portion is set to W2, a relationship of 50 μm≦T≦210 μm is satisfied, and a relationship of 0.067≦W2/W1≦0.335 is satisfied, and in which, when a width of the arm section of the vibrating arm is set to W3, and a width of the hammer head is set to W4, a relationship of W4≧2.8×W3 is satisfied.