公开(公告)号：US09644962B2

公开(公告)日：2017-05-09

申请号：US14527095

申请日：2014-10-29

Applicant: Seiko Epson Corporation

Inventor： Shinya Aoki ,  Osamu Kawauchi ,  Juichiro Matsuzawa ,  Masaru Mikami

IPC: B23K31/02 ,  G01C19/5769 ,  H05K5/06 ,  H01L23/10 ,  G01C19/574 ,  B23K101/12

CPC classification number: G01C19/5769 ,  B23K2101/12 ,  G01C19/574 ,  H01L23/10 ,  H01L2224/16225 ,  H01L2224/73204 ,  H01L2924/16195 ,  H05K5/066

Abstract: A manufacturing method of an electronic device, that accommodates a gyro element as an electronic component in an inner space formed by a base and a lid as a lid body, includes: preparing the lid in which a groove is provided on a surface which is welded with the base, and an opening area of the groove on the inner space side which is smaller than an opening area on the outer periphery side of the lid; welding, first, the base and the lid at a portion excluding an unwelded portion that includes at least apart of the groove, of a planned welding portion of the base and the lid; and welding, second, the base and the lid at the unwelded portion such that the groove is closed.

公开(公告)号：US09291457B2

公开(公告)日：2016-03-22

申请号：US14164807

申请日：2014-01-27

Applicant: Seiko Epson Corporation

Inventor： Shinya Aoki ,  Juichiro Matsuzawa ,  Osamu Kawauchi ,  Masaru Mikami

IPC: H01L21/00 ,  H01L23/10 ,  G01C19/5783 ,  H05K5/06

CPC classification number: G01C19/5783 ,  H01L2224/16225 ,  H01L2924/16195 ,  H05K5/066

Abstract: A method of manufacturing an electronic device in which an inner space for housing a gyro element is formed between a base and a lid and the base and the lid are bonded includes bonding the base and the lid in which a groove is provided on a surface to be bonded with the base so that the inner space communicates with the outside by not bonding the inner surface of the groove to the base and to position the groove around a concave portion provided on a side surface of the base, and closing a communication portion by irradiating a laser beam to the lid in the communication portion.

Abstract translation: 一种制造电子装置的方法，其中在基座和盖之间形成用于容纳陀螺元件的内部空间，并且基座和盖被粘合包括将基座和在其上设置有凹槽的盖接合到 与基部结合，使得内部空间通过不将槽的内表面接合到基座而与外部连通并且将槽定位在设置在基座的侧表面上的凹部周围，并且通过 将激光束照射到通信部中的盖上。

公开(公告)号：US11784632B2

公开(公告)日：2023-10-10

申请号：US16551137

申请日：2019-08-26

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi Yamazaki ,  Osamu Kawauchi ,  Akihiko Ebina

IPC: H03H9/205 ,  H03H9/05 ,  H03H9/10 ,  B23K26/362 ,  H03H3/04 ,  H03H9/15 ,  H03H3/02

CPC classification number: H03H9/205 ,  B23K26/362 ,  H03H3/04 ,  H03H9/0595 ,  H03H9/1014 ,  H03H2003/027 ,  H03H2003/0457 ,  H03H2009/155

Abstract: A vibrator device includes: a base; a vibrator disposed in the base; and a lid including a substrate having a light transmitting property and a silicon substrate joined to the substrate and a part of the base surrounding the vibrator.

公开(公告)号：US20210237202A1

公开(公告)日：2021-08-05

申请号：US17160877

申请日：2021-01-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Osamu Kawauchi ,  Masashi Shimura ,  Shogo Sasaki

IPC: B23K26/36

Abstract: A method of manufacturing a vibrator device includes preparing a vibrator element including a vibrating arm and a weight provided to the vibrating arm, and irradiating the weight with a laser beam to remove apart of the weight. Further, in the step of irradiating the weight with the laser beam to remove the part of the weight, the part of the weight is irradiated with the laser beam to thereby provide the weight with a removed area where the part of the weight is removed, and an unremoved area where the weight is not removed, and in an area close to the unremoved area in the removed area, an amount of irradiation with the laser beam is gradually increased in a direction from the unremoved area side toward the removed area.

公开(公告)号：US20130320816A1

公开(公告)日：2013-12-05

申请号：US13904405

申请日：2013-05-29

Applicant: Seiko Epson Corporation

Inventor： Keiichi Yamaguchi ,  Osamu Kawauchi

IPC: H01L41/332 ,  H01L41/04

CPC classification number: H01L41/332 ,  H01L41/04 ,  H03H9/21 ,  H03H2003/026

Abstract: A vibrator element includes a base section, and a vibrating arm projecting from the base section, and having a plurality of groove sections, the vibrating arm is provided with the groove sections, and the groove sections are each formed to have a length in a width direction of the vibrating arm longer than a length in a longitudinal direction of the vibrating arm, and arranged side by side along the longitudinal direction of the vibrating arm.

Abstract translation: 振动元件包括基部和从基部突出的振动臂，并且具有多个槽部，所述振动臂设置有所述槽部，并且所述槽部各自形成为具有宽度的长度 所述振动臂的方向长于所述振动臂的长度方向的长度，并且沿着所述振动臂的长度方向并列配置。

公开(公告)号：US10662055B2

公开(公告)日：2020-05-26

申请号：US15961564

申请日：2018-04-24

Applicant: SEIKO EPSON CORPORATION

Inventor： Takashi Yamazaki ,  Akihiko Ebina ,  Osamu Kawauchi ,  Yoshihiko Yokoyama

IPC: B81B7/00 ,  B81C1/00

Abstract: A MEMS element includes a surface silicon layer on which an element is formed and on which a first electrode and a second electrode as element electrodes and an electrode pad connected to the first electrode and the second electrode are disposed, and in which a first wiring through-hole is disposed at a position overlapping with the electrode pad of the surface silicon layer and a wiring electrode electrically connected to the electrode pad is disposed in the first wiring through-hole, in plan view.

公开(公告)号：US09706673B2

公开(公告)日：2017-07-11

申请号：US14527947

申请日：2014-10-30

Applicant: Seiko Epson Corporation

Inventor： Osamu Kawauchi ,  Shinya Aoki ,  Juichiro Matsuzawa ,  Masaru Mikami

IPC: H05K5/06 ,  B23K1/00 ,  H05K5/02 ,  B23K11/06 ,  B23K28/02 ,  H03H9/05 ,  H03H9/10 ,  B23K26/244 ,  G01C19/5783 ,  B23K101/40

CPC classification number: H05K5/066 ,  B23K1/0016 ,  B23K11/06 ,  B23K26/244 ,  B23K28/02 ,  B23K2101/40 ,  G01C19/5783 ,  H01L2224/16225 ,  H01L2924/16195 ,  H03H9/0552 ,  H03H9/1014 ,  H03H9/1071 ,  H05K5/0239

Abstract: A manufacturing method of an electronic device, that accommodates a gyro element as an electronic component in an inner space formed by a base and a lid as a lid body, includes: preparing the lid in which a groove is provided on the rear surface which is welded with the base, and an opening area of the groove on the inner space side which is greater than an opening area on the outer periphery side of the lid; welding, first, the base and the lid at a portion excluding an unwelded portion that includes at least apart of the groove, of a planned welding portion of the base and the lid; and welding, second, the base and the lid at the unwelded portion such that the groove is closed.

公开(公告)号：US11664782B2

公开(公告)日：2023-05-30

申请号：US17160882

申请日：2021-01-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Osamu Kawauchi ,  Masashi Shimura ,  Shogo Sasaki

IPC: H03H9/13 ,  H03H3/04 ,  H03H9/05 ,  H03H9/19 ,  H03H9/10 ,  H03H3/02

CPC classification number: H03H9/132 ,  H03H3/04 ,  H03H9/0557 ,  H03H9/1021 ,  H03H9/19 ,  H03H2003/022 ,  H03H2003/0428

Abstract: The vibrator element includes a base part, a vibrating arm extending from the base part, and a weight provided to the vibrating arm, wherein the weight includes a thick film part, a thin film part thinner in film thickness than the thick film part, and a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part.

公开(公告)号：US20220407499A1

公开(公告)日：2022-12-22

申请号：US17832971

申请日：2022-06-06

Applicant: SEIKO EPSON CORPORATION

Inventor： Osamu Kawauchi ,  Takuro Kobayashi

IPC: H03H9/215 ,  H03H3/04 ,  H03H9/10

Abstract: A vibrating arm of a vibrator element has a first surface, a second surface at an opposite side to the first surface in a Z direction, a first side surface and a second side surface as side surfaces, and a third side surface as a tip surface. At least one of the first side surface, the second side surface, and the third side surface includes a first side surface part tilted with respect to a Z direction, and a second side surface part tilted toward the first surface or the second surface with respect to the first side surface part. The first weight is arranged so that an outer edge of the first weight is located at inner side of innermost parts in the first side surface part and the second side surface part, or at the same position as the innermost parts when viewed from the Z direction.

公开(公告)号：US20210242856A1

公开(公告)日：2021-08-05

申请号：US17160882

申请日：2021-01-28

Applicant: SEIKO EPSON CORPORATION

Inventor： Osamu Kawauchi ,  Masashi Shimura ,  Shogo Sasaki

IPC: H03H9/13 ,  H03H3/04 ,  H03H9/05 ,  H03H9/10 ,  H03H9/19

Abstract: The vibrator element includes a base part, a vibrating arm extending from the base part, and a weight provided to the vibrating arm, wherein the weight includes a thick film part, a thin film part thinner in film thickness than the thick film part, and a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part.