Invention Grant
- Patent Title: Method for manufacturing a display device
-
Application No.: US17694754Application Date: 2022-03-15
-
Publication No.: US11791346B2Publication Date: 2023-10-17
- Inventor: Isao Suzumura
- Applicant: Japan Display Inc.
- Applicant Address: JP Tokyo
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP 18002641 2018.01.11
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/00 ; H01L29/00 ; H01L27/12 ; G02F1/1368 ; H01L29/40 ; H01L29/423 ; H10K59/126 ; H01L21/426

Abstract:
The purpose of the present invention is to decrease the resistance of the drain and source in the TFT of the oxide semiconductor as well as to have stable Vd-Id characteristics of the TFT. The structure of the present invention is as follows: A display device having plural pixels including thin film transistors (TFT) having oxide semiconductor films comprising: a gate insulating film formed on the oxide semiconductor film, an aluminum oxide film formed on the gate insulating film, a gate electrode formed on the aluminum oxide film, a side spacer formed on both sides of the gate electrode, and an interlayer insulating film formed on the gate electrode, the side spacer, a drain and a source, wherein in a plan view, and in a direction from the drain to the source, a length of the gate electrode is shorter than a length of the aluminum oxide film.
Public/Granted literature
- US20220208795A1 DISPLAY DEVICE Public/Granted day:2022-06-30
Information query
IPC分类: