- 专利标题: Field effect transistor with multiple gate dielectrics and dual work-functions with precisely controlled gate lengths
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申请号: US17371714申请日: 2021-07-09
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公开(公告)号: US11791396B2公开(公告)日: 2023-10-17
- 发明人: Kangguo Cheng , Ruilong Xie , Julien Frougier , Chanro Park
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Samuel Waldbaum
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/423
摘要:
A multiple gate dielectrics and dual work-functions field effect transistor (MGO-DWF-FET) is provided on an active region of a semiconductor substrate. The MGO-DWF-FET includes a first functional gate structure including a U-shaped first high-k gate dielectric material layer and a first work-function metal-containing structure, and a laterally adjacent, and contacting, second functional gate structure that includes a U-shaped second high-k gate dielectric material layer and a second work-function metal-containing structure. The first functional gate structure has a gate length that differs from a gate length of the second functional gate structure.
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