Invention Grant
- Patent Title: Power converter, power supply system and HF plasma system
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Application No.: US17161808Application Date: 2021-01-29
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Publication No.: US11798786B2Publication Date: 2023-10-24
- Inventor: Andrzej Klimczak , Konrad Lewandowski , Marcin Golan
- Applicant: TRUMPF Huettinger Sp. z o. o.
- Applicant Address: PL Zielonka
- Assignee: TRUMPF HUETTINGER SP. Z O. O.
- Current Assignee: TRUMPF HUETTINGER SP. Z O. O.
- Current Assignee Address: PL Zielonka
- Agency: LEYDIG, VOIT & MAYER, LTD.
- Priority: EP 461598 2018.08.02
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03F3/21 ; H03F3/217

Abstract:
A power converter configured to generate a high-frequency power signal comprises at least one amplifier stage having first and second amplifier paths each having an amplifier, the first amplifier path outputting a first amplifier path output signal and the second amplifier path outputting a second amplifier path output signal that, has a phase shift relative to the first amplifier path output signal greater than 0° and less than 180°. The first and second amplifier paths are connected to a phase-shifting coupler that is configured to couple the first and second amplifier path output signals to form the high-frequency power signal. At least one amplifier of the first and second amplifier paths comprises a SiC MOSFET.
Public/Granted literature
- US20210159050A1 POWER CONVERTER, POWER SUPPLY SYSTEM AND HF PLASMA SYSTEM Public/Granted day:2021-05-27
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