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公开(公告)号：US11674981B2
公开(公告)日：2023-06-13
申请号：US17161768
申请日：2021-01-29
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Konrad Lewandowski , Marcin Golan
IPC: G01R19/00 , G01R19/165 , G01R27/02 , H01J37/34 , H01J37/32
CPC classification number: G01R19/0061 , G01R19/16566 , G01R27/02 , H01J37/32082 , H01J37/3476 , H01J2237/24564 , H01J2237/332
Abstract: An arc detector for detecting arcs in an RF plasma system includes at least two inputs configured to connect to an RF source, at least one output configured to connect to a plasma load, and a 3 dB coupler connected to the at least two inputs and the at least one output. The arc detector further includes a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, and a differentiator configured to differentiate the evaluation quantity. The arc detector additionally includes a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.
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Patent Agency Ranking
公开(公告)号：US20210156893A1
公开(公告)日：2021-05-27
申请号：US17161768
申请日：2021-01-29
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Konrad Lewandowski , Marcin Golan
IPC: G01R19/00 , G01R19/165 , G01R27/02 , H01J37/34 , H01J37/32
Abstract: An arc detector for detecting arcs in an RF plasma system includes at least two inputs configured to connect to an RF source, at least one output configured to connect to a plasma load, and a 3 dB coupler connected to the at least two inputs and the at least one output. The arc detector further includes a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, and a differentiator configured to differentiate the evaluation quantity. The arc detector additionally includes a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.
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公开(公告)号：US11798786B2
公开(公告)日：2023-10-24
申请号：US17161808
申请日：2021-01-29
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Konrad Lewandowski , Marcin Golan
CPC classification number: H01J37/32174 , H03F3/2176
Abstract: A power converter configured to generate a high-frequency power signal comprises at least one amplifier stage having first and second amplifier paths each having an amplifier, the first amplifier path outputting a first amplifier path output signal and the second amplifier path outputting a second amplifier path output signal that, has a phase shift relative to the first amplifier path output signal greater than 0° and less than 180°. The first and second amplifier paths are connected to a phase-shifting coupler that is configured to couple the first and second amplifier path output signals to form the high-frequency power signal. At least one amplifier of the first and second amplifier paths comprises a SiC MOSFET.
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公开(公告)号：US20210159872A1
公开(公告)日：2021-05-27
申请号：US17163605
申请日：2021-02-01
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Marcin Golan , Pawel Ozimek
Abstract: A balun configured for a power range between 500 W and 5 kW output includes a balanced signal port comprising a first connection and a second connection and further includes a single-ended signal port comprising a third connection and a fourth connection, the fourth connection being connected to ground. In addition, the balun includes a first capacitor disposed between the first connection and a first end of a first resistor and a second capacitor disposed between the second connection and the first end of the first resistor. A second end of the first resistor is connected to ground.
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公开(公告)号：US11955947B2
公开(公告)日：2024-04-09
申请号：US17163605
申请日：2021-02-01
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Marcin Golan , Pawel Ozimek
CPC classification number: H03H7/42 , H03F3/265 , H03F2200/09 , H03F2200/451
Abstract: A balun configured for a power range between 500 W and 5 kW output includes a balanced signal port comprising a first connection and a second connection and further includes a single-ended signal port comprising a third connection and a fourth connection, the fourth connection being connected to ground. In addition, the balun includes a first capacitor disposed between the first connection and a first end of a first resistor and a second capacitor disposed between the second connection and the first end of the first resistor. A second end of the first resistor is connected to ground.
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公开(公告)号：US20210159050A1
公开(公告)日：2021-05-27
申请号：US17161808
申请日：2021-01-29
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Konrad Lewandowski , Marcin Golan
Abstract: A power converter configured to generate a high-frequency power signal comprises at least one amplifier stage having first and second amplifier paths each having an amplifier, the first amplifier path outputting a first amplifier path output signal and the second amplifier path outputting a second amplifier path output signal that, has a phase shift relative to the first amplifier path output signal greater than 0° and less than 180°. The first and second amplifier paths are connected to a phase-shifting coupler that is configured to couple the first and second amplifier path output signals to form the high-frequency power signal. At least one amplifier of the first and second amplifier paths comprises a SiC MOSFET.
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