Invention Grant
- Patent Title: Optical image contrast metric for optical target search
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Application No.: US17355126Application Date: 2021-06-22
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Publication No.: US11803960B2Publication Date: 2023-10-31
- Inventor: Huan Jin , Xiaochun Li , Sangbong Park , Zhifeng Huang
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: HODGSON RUSS LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; H01L21/66

Abstract:
Global and local alignment energies are used in an image contrast metric. The image contrast metric can be used to find optical targets. Some pixels from a gradient magnitude image and a context range image from an optical image can be used to determine the image contrast metric. A heatmap from the image contrast metrics across part of a wafer can then be used to make a list of targets. Upper and lower confidence values can be applied to rank the available targets.
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