Invention Grant
- Patent Title: Word line structures for three-dimensional memory arrays
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Application No.: US17656283Application Date: 2022-03-24
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Publication No.: US11804252B2Publication Date: 2023-10-31
- Inventor: Stephen W. Russell , Lorenzo Fratin , Enrico Varesi , Paolo Fantini
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Holland & Hart LLP
- Main IPC: G11C8/00
- IPC: G11C8/00 ; G11C8/10 ; G11C8/14 ; H01L23/522 ; H10B63/00 ; H10N70/00

Abstract:
Methods, systems, and devices for word line structures for three-dimensional memory arrays are described. A memory device may include word line structures that support accessing memory cells arranged in a three-dimensional level architecture. The word line structures may be arranged above a substrate and be separated from each other by respective dielectric layers. Each word line structure may include word line members and a word line plate that is connected to each word line member. Each word line plate may include a contact that may be coupled with a word line decoder operable to bias the word line plate. To couple the word line plate to the word line decoder, the memory device may include first vias that extend through holes in the word line plates and are coupled with second vias that extend from a respective contact through openings in the word line plates above the contact.
Public/Granted literature
- US20230307025A1 WORD LINE STRUCTURES FOR THREE-DIMENSIONAL MEMORY ARRAYS Public/Granted day:2023-09-28
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