Invention Grant
- Patent Title: Advanced polishing pads and related polishing pad manufacturing methods
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Application No.: US16906992Application Date: 2020-06-19
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Publication No.: US11806829B2Publication Date: 2023-11-07
- Inventor: Puneet Narendra Jawali , Nandan Baradanahalli Kenchappa , Jason G. Fung , Shiyan Akalanka Jayanath Wewala Gonnagahadeniyage , Rajeev Bajaj , Adam Wade Manzonie , Andrew Scott Lawing
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: B24B37/24
- IPC: B24B37/24 ; B24B37/22 ; B24B37/26 ; B24B37/30

Abstract:
Embodiments herein generally relate to polishing pads and method of forming polishing pads. In one embodiment, a polishing pad having a polishing surface that is configured to polish a surface of a substrate is provided. The polishing pad includes a polishing layer. At least a portion of the polishing layer comprises a continuous phase of polishing material featuring a plurality of first regions having a first pore-feature density and a plurality of second regions having a second pore-feature density that is different from the first pore-feature density. The plurality of first regions are distributed in a pattern in an X-Y plane of the polishing pad in a side-by-side arrangement with the plurality of second regions and individual portions or ones of the plurality of first regions are interposed between individual portions or ones of the plurality of second regions.
Public/Granted literature
- US20210394333A1 ADVANCED POLISHING PADS AND RELATED POLISHING PAD MANUFACTURING METHODS Public/Granted day:2021-12-23
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