Invention Grant
- Patent Title: Thermal conductivity pressure gauge with heated chamber wall
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Application No.: US17453450Application Date: 2021-11-03
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Publication No.: US11808643B2Publication Date: 2023-11-07
- Inventor: Gerardo A. Brucker , Timothy C. Swinney
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS INSTRUMENTS, INC.
- Current Assignee: MKS INSTRUMENTS, INC.
- Current Assignee Address: US MA Andover
- Agency: HAMILTON, BROOK, SMITH & REYNOLDS, P.C.
- Main IPC: G01L21/12
- IPC: G01L21/12 ; G01L21/14 ; G01L11/00

Abstract:
A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.
Public/Granted literature
- US20220155172A1 Thermal Conductivity Gauge Public/Granted day:2022-05-19
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