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公开(公告)号：US20240118158A1
公开(公告)日：2024-04-11
申请号：US18045685
申请日：2022-10-11
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Scott C. Heinbuch , Timothy C. Swinney
IPC: G01L21/12
CPC classification number: G01L21/12
Abstract: A thermal conductivity gauge implements a model of power dissipation to accurately measure gas pressure. An envelope surrounds a gas volume, and a sensor wire is positioned within the gas volume. The controller provides a model of power dissipation from the thermal conductivity gauge, including power loss due to conductive heat loss from sensor wire end contacts, radiative loss from the sensor wire toward the gas envelope, and pressure dependent conductive heat loss from the sensor wire through surrounding gas. The controller then applies a power input to the sensor wire to heat the sensor wire, and measures total power dissipation WT, sensor wire temperature Ts, and envelope temperature Te during the application of the power input. Gas pressure within the envelope is determined based on the measured WT, Ts and Te and the model of power dissipation.
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公开(公告)号：US20220155172A1
公开(公告)日：2022-05-19
申请号：US17453450
申请日：2021-11-03
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.
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公开(公告)号：US09714919B2
公开(公告)日：2017-07-25
申请号：US14384782
申请日：2013-03-13
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , G. Jeffery Rathbone
CPC classification number: G01N27/64 , G01N1/405 , G01N27/60 , H01J49/06 , H01J49/162 , H01J49/4245
Abstract: A method of detecting specific gas species in an ion trap, the specific gas species initially being a trace component of a first low concentration in the volume of gas, includes ionizing the gas including the specific gas species, thereby creating specific ion species. The method further includes producing an electrostatic potential in which the specific ion species are confined in the ion trap to trajectories. The method also includes exciting confined specific ion species with an AC excitation source having an excitation frequency, scanning the excitation frequency of the AC excitation source to eject the specific ion species from the ion trap, and detecting the ejected specific ion species. The method further includes increasing the concentration of the specific ion species within the ion trap relative to the first low concentration prior to scanning the excitation frequency that ejects the ions of the specific gas species.
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公开(公告)号：US20150091579A1
公开(公告)日：2015-04-02
申请号：US14500820
申请日：2014-09-29
Applicant: MKS Instruments, Inc,
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
Abstract translation: 冷阴极电离真空计包括延伸的阳极电极和沿其长度包围阳极电极的阴极电极，并在阳极电极和阴极电极之间形成放电空间。 真空计进一步包括导电保护环电极，其围绕阳极电极的底部插入在阴极电极和阳极电极之间以收集泄漏电流;以及放电启动器装置，设置在保护环电极上并与保护环电极电连接， 启动器装置具有指向阳极的多个尖端并且在尖端和阳极之间形成间隙。
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公开(公告)号：US12181366B2
公开(公告)日：2024-12-31
申请号：US18583344
申请日：2024-02-21
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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Patent Agency Ranking
公开(公告)号：US11946823B2
公开(公告)日：2024-04-02
申请号：US18303222
申请日：2023-04-19
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
CPC classification number: G01L9/025 , G01L9/00 , G01L9/0002 , G01L21/10 , G01L21/14
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US10359332B2
公开(公告)日：2019-07-23
申请号：US14994969
申请日：2016-01-13
Applicant: MKS Instruments, Inc.
Inventor： Brandon J. Kelly , Clinton L. Percy , Scott C. Heinbuch , Gerardo A. Brucker , Timothy C. Swinney , Timothy R. Piwonka-Corle
Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
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公开(公告)号：US20180164176A1
公开(公告)日：2018-06-14
申请号：US15834625
申请日：2017-12-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
IPC: G01L21/34
Abstract: A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode. The CCIG further includes a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma. A shield is electrically isolated from the insulator and shields the insulator from electrons of the plasma. The shield may be mounted to the cathode and surrounds and is spaced from the anode. An electric controller applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.
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公开(公告)号：US20170315012A1
公开(公告)日：2017-11-02
申请号：US15499064
申请日：2017-04-27
Applicant: MKS Instruments, Inc.
Inventor： Timothy C. Swinney , Clinton L. Percy , Duane W. Marion , Brandon J. Kelly
IPC: G01L21/34
Abstract: A cold cathode ionization gauge includes multiple cathodes providing different spacings between the cathodes and an anode. The multiple cathodes allow for pressure measurements over wider ranges of pressure. A first cathode with a larger spacing may provide current based on Townsend discharge; whereas, a second cathode having a smaller spacing may provide current based on both Townsend discharge at higher pressures and on Paschen's Law discharge at still higher pressures. A feature on the second cathode may support Paschen's Law discharge. Large resistances between the cathodes and a return to power supply enable control of output profiles to extend the pressure ranges with accurate responses and avoid output minima. Pressure measurements may be made based on currents from respective cathodes dependent on the outputs of the cathodes through the wide pressure range of measurement. The multiple cathodes may also provide measurements that avoid the discontinuities found in current outputs of the respective cathodes.
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公开(公告)号：US09797797B2
公开(公告)日：2017-10-24
申请号：US14537593
申请日：2014-11-10
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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