- 专利标题: Process manufacturing method, method for adjusting threshold voltage device, and storage medium
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申请号: US17198462申请日: 2021-03-11
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公开(公告)号: US11809802B2公开(公告)日: 2023-11-07
- 发明人: Abraham Yoo , Ying Jin , Jisong Jin
- 申请人: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- 申请人地址: CN Shanghai
- 专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人地址: CN Shanghai; CN Beijing
- 代理机构: Crowell & Moring, LLP
- 优先权: CN 2010245619.4 2020.03.31
- 主分类号: G06F30/398
- IPC分类号: G06F30/398 ; H01L21/321 ; H01L29/40 ; G06F119/08 ; G06F119/18
摘要:
A process manufacturing method, a method for adjusting a threshold voltage, a device, and a storage medium are provided. One form of a process manufacturing method includes: determining a type of to-be-formed MOS device and a corresponding threshold voltage interval; obtaining, according to a MOS device type and the corresponding threshold voltage interval, a corresponding threshold voltage adjustment process by querying a pre-configured first mapping relationship of the threshold voltage interval and a second mapping relationship of the threshold voltage interval; and establishing a process flow according to the corresponding threshold voltage adjustment process, the first mapping relationship being a mapping relationship between the threshold voltage interval and the MOS device type; and the second mapping relationship being a correspondence between the threshold voltage interval in the first mapping relationship and a threshold voltage adjustment process formed by at least one adjustment process selected from a preset process flow, the threshold voltage adjustment process causing a threshold voltage to be in the corresponding threshold voltage interval under the action of a total threshold voltage offset. According to the present disclosure, the difficulty in adjusting the threshold voltage is reduced.
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