- 专利标题: Info packages including thermal dissipation blocks
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申请号: US17371673申请日: 2021-07-09
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公开(公告)号: US11817324B2公开(公告)日: 2023-11-14
- 发明人: Ching-Yi Lin , Yu-Hao Chen , Fong-Yuan Chang , Po-Hsiang Huang , Jyh Chwen Frank Lee , Shuo-Mao Chen
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L21/48
- IPC分类号: H01L21/48 ; H01L23/498 ; H01L23/367 ; H01L23/00
摘要:
A method includes forming a package, which includes forming a plurality of redistribution lines over a carrier, and forming a thermal dissipation block over the carrier. The plurality of redistribution lines and the thermal dissipation block are formed by common processes. The thermal dissipation block has a first metal density, and the plurality of redistribution lines have a second metal density smaller than the first metal density. The method further includes forming a metal post over the carrier, placing a device die directly over the thermal dissipation block, and encapsulating the device die and the metal post in an encapsulant. The package is then de-bonded from the carrier.
公开/授权文献
- US20220367210A1 Info Packages Including Thermal Dissipation Blocks 公开/授权日:2022-11-17
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