- 专利标题: Semiconductor device
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申请号: US17369236申请日: 2021-07-07
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公开(公告)号: US11824059B2公开(公告)日: 2023-11-21
- 发明人: Keun Hwi Cho , Sangdeok Kwon , Dae Sin Kim , Dongwon Kim , Yonghee Park , Hagju Cho
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR 20200151739 2020.11.13
- 主分类号: H01L27/118
- IPC分类号: H01L27/118 ; H01L21/8238 ; H01L27/02 ; H01L27/092
摘要:
A semiconductor device includes first and second active patterns respectively on the first and second active regions of a substrate, a gate electrode on the first and second channel patterns, active contacts electrically connected to at least one of the first and second source/drain patterns, a gate contact electrically connected to the gate electrode, a first metal layer on the active and gate contacts and including a first and second power line, and first and second gate cutting patterns below the first and second power lines. The first active pattern may include first channel pattern between a pair of first source/drain patterns. The second active pattern may include a second channel pattern between a pair of second source/drain patterns. The first and second gate cutting patterns may cover the outermost side surfaces of the first and second channel patterns, respectively.
公开/授权文献
- US20220157853A1 SEMICONDUCTOR DEVICE 公开/授权日:2022-05-19
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