- 专利标题: PIC die with optical deflector for ambient light
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申请号: US17450324申请日: 2021-10-08
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公开(公告)号: US11837547B2公开(公告)日: 2023-12-05
- 发明人: Roderick Alan Augur , Yusheng Bian , Robert John Fox, III
- 申请人: GlobalFoundries U.S. Inc.
- 申请人地址: US NY Malta
- 专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人地址: US NY Malta
- 代理机构: Hoffman Warnick LLC
- 代理商 Anthony Canale
- 主分类号: H01L23/532
- IPC分类号: H01L23/532 ; H01L23/552 ; H01L23/522
摘要:
A photonic integrated circuit (PIC) die includes a silicon nitride optical component over an active region. Multiple interconnect layers are over the silicon nitride optical component, each of the multiple interconnect layers including a metal interconnect therein. At least one optical deflector is over the multiple interconnect layers and over the silicon nitride optical component. The optical deflector(s) may also include a contact passing therethrough to the interconnect layers, but do not include any other electrical interconnects. Each optical deflector may deflect light within an ambient light range of less than 570 nanometers (nm) to protect the silicon nitride optical component from light-induced degradation.
公开/授权文献
- US20230113261A1 PIC DIE WITH OPTICAL DEFLECTOR FOR AMBIENT LIGHT 公开/授权日:2023-04-13
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