Invention Grant
- Patent Title: Three-dimensional semiconductor memory device
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Application No.: US17982255Application Date: 2022-11-07
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Publication No.: US11854982B2Publication Date: 2023-12-26
- Inventor: Bongsoon Lim , Sang-Wan Nam , Sang-Won Park , Sang-Won Shim , Hongsoo Jeon , Yonghyuk Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR 20180149912 2018.11.28
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H10B43/27 ; H10B43/40

Abstract:
A three-dimensional semiconductor memory device may include a first stack structure block including first stack structures arranged in a first direction on a substrate, a second stack structure block including second stack structures arranged in the first direction on the substrate, a separation structure disposed on the substrate between the first and second stack structure blocks and including first mold layers and second mold layers, and a contact plug penetrating the separation structure. A bottom surface of the contact plug may contact the substrate.
Public/Granted literature
- US20230056261A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2023-02-23
Information query
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