Invention Grant
- Patent Title: Non-linear tethers for suspended devices
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Application No.: US17978642Application Date: 2022-11-01
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Publication No.: US11863154B2Publication Date: 2024-01-02
- Inventor: António José Marques Trindade , Lei Liu , Ronald S. Cok
- Applicant: X-Celeprint Limited
- Applicant Address: IE Dublin
- Assignee: X-Celeprint Limited
- Current Assignee: X-Celeprint Limited
- Current Assignee Address: IE Dublin
- Agency: Choate, Hall & Stewart LLP
- Agent Michael D. Schmitt
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02
Abstract:
A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.
Public/Granted literature
- US20230085815A1 NON-LINEAR TETHERS FOR SUSPENDED DEVICES Public/Granted day:2023-03-23
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