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公开(公告)号：US11863154B2
公开(公告)日：2024-01-02
申请号：US17978642
申请日：2022-11-01
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Lei Liu , Ronald S. Cok
CPC classification number: H03H9/02338 , H03H3/02 , H03H2003/027
Abstract: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.
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公开(公告)号：US12237443B2
公开(公告)日：2025-02-25
申请号：US17672396
申请日：2022-02-15
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Alexandre Chikhaoui , Ronald S. Cok , Robert R. Rotzoll , Raja Fazan Gul , Lei Liu
IPC: H01L33/48 , H01L25/075
Abstract: A micro-device structure includes an insulating layer and a micro-device disposed on the insulating layer. A pocket is formed in the micro-device that extends from a surface of the micro-device opposite the insulating layer through the micro-device to the insulating layer. A micro-component is disposed in the pocket and is non-native to the micro-device and the insulating layer. The micro-component can emit or receive light through the insulating layer and can be connected to and controlled by a micro-circuit disposed in the micro-device.
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公开(公告)号：US11626856B2
公开(公告)日：2023-04-11
申请号：US17006498
申请日：2020-08-28
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Raja Fazan Gul , Lei Liu , Ronald S. Cok
Abstract: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures. A device structure can comprise a device over a sacrificial portion or cavity and a tether with a tether opening extending to the sacrificial portion or cavity. The tether or tether opening can have a T shape. The tether can have a tether length at least one third as large as a device length and the device can have a device length at least twice as large as a device width.
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公开(公告)号：US20230085815A1
公开(公告)日：2023-03-23
申请号：US17978642
申请日：2022-11-01
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Lei Liu , Ronald S. Cok
Abstract: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.
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Patent Agency Ranking
公开(公告)号：US11637540B2
公开(公告)日：2023-04-25
申请号：US16669499
申请日：2019-10-30
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Lei Liu , Ronald S. Cok
Abstract: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.
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公开(公告)号：US20210135648A1
公开(公告)日：2021-05-06
申请号：US16669499
申请日：2019-10-30
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Lei Liu , Ronald S. Cok
Abstract: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.
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公开(公告)号：US20230261149A1
公开(公告)日：2023-08-17
申请号：US17672396
申请日：2022-02-15
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Alexandre Chikhaoui , Ronald S. Cok , Robert R. Rotzoll , Raja Fazan Gul , Lei Liu
IPC: H01L33/48 , H01L25/075
CPC classification number: H01L33/483 , H01L25/0753 , H01L2933/0033
Abstract: A micro-device structure includes an insulating layer and a micro-device disposed on the insulating layer. A pocket is formed in the micro-device that extends from a surface of the micro-device opposite the insulating layer through the micro-device to the insulating layer. A micro-component is disposed in the pocket and is non-native to the micro-device and the insulating layer. The micro-component can emit or receive light through the insulating layer and can be connected to and controlled by a micro-circuit disposed in the micro-device.
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公开(公告)号：US20230327640A1
公开(公告)日：2023-10-12
申请号：US18119773
申请日：2023-03-09
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Raja Fazan Gul , Lei Liu , Ronald S. Cok
CPC classification number: H03H9/02338 , H10N30/204 , B81B2201/03 , H03H2009/155
Abstract: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures. A device structure can comprise a device over a sacrificial portion or cavity and a tether with a tether opening extending to the sacrificial portion or cavity. The tether or tether opening can have a T shape. The tether can have a tether length at least one third as large as a device length and the device can have a device length at least twice as large as a device width.
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公开(公告)号：US20210135649A1
公开(公告)日：2021-05-06
申请号：US17006498
申请日：2020-08-28
Applicant: X-Celeprint Limited
Inventor： António José Marques Trindade , Raja Fazan Gul , Lei Liu , Ronald S. Cok
Abstract: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures. A device structure can comprise a device over a sacrificial portion or cavity and a tether with a tether opening extending to the sacrificial portion or cavity. The tether or tether opening can have a T shape. The tether can have a tether length at least one third as large as a device length and the device can have a device length at least twice as large as a device width.
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