TRANSFER-PRINTABLE MICRO-OPTICAL STRUCTURES
    2.
    发明公开

    公开(公告)号:US20240295692A1

    公开(公告)日:2024-09-05

    申请号:US18593039

    申请日:2024-03-01

    IPC分类号: G02B6/122 G02B6/12 G02B6/136

    摘要: A micro-optical structure includes a structure substrate comprising a cavity and a micro-optical component disposed entirely and directly over or in the cavity. The micro-optical component includes a micro-optical element and a component tether physically attached to an anchor portion of the structure substrate and in contact with the micro-optical element. The structure substrate and the micro-optical component can be monolithic, for example unitary and comprise a same material or are the same material. The micro-optical component can be disposed on a sacrificial portion disposed on a micro-optical component source wafer differentially etchable form the sacrificial portion. The micro-optical component can be disposed on a micro-optical component source wafer patterned with an encapsulation layer where the micro-optical component is differentially etchable from the encapsulation layer and the micro-optical component.

    THREE-DIMENSIONAL MICRO-OPTICAL SYSTEMS
    3.
    发明公开

    公开(公告)号:US20240231017A1

    公开(公告)日:2024-07-11

    申请号:US18405572

    申请日:2024-01-05

    发明人: Ronald S. Cok

    IPC分类号: G02B6/42

    摘要: A micro-optical component includes a micro-substrate, a micro-optical element disposed on the micro-substrate, and a stand-off (a mechanical spacer) disposed on the micro-substrate or micro-optical component in a separate plane from the micro-substrate that at least partially encloses the micro-optical element. The micro-optical components can be stacked on a system substrate using micro-transfer printing to form a three-dimensional micro-optical structure. One more light beams can travel or pass through various combinations of multiple micro-optical components and micro-optical elements.

    Micro-component anti-stiction structures

    公开(公告)号:US11670603B2

    公开(公告)日:2023-06-06

    申请号:US17366842

    申请日:2021-07-02

    IPC分类号: H01L23/58 H01L23/544

    摘要: A micro-component comprises a component substrate having a first side and an opposing second side. Fenders project from the first and second sides of the component substrate and include first-side fenders extending from the first side and a second-side fender extending from the second side of the component substrate. At least two of the first-side fenders have a non-conductive surface and are disposed closer to a corner of the component substrate than to a center of the component substrate.

    PRINTING COMPONENTS TO SUBSTRATE POSTS WITH GAPS

    公开(公告)号:US20230131998A1

    公开(公告)日:2023-04-27

    申请号:US17968418

    申请日:2022-10-18

    摘要: A printed structure includes a substrate comprising a substrate surface, a substrate circuit disposed in or on in a circuit area of the substrate surface, a substrate post protruding from the substrate surface exterior to the circuit area, and a component having a component top side and a component bottom side opposite the component top side. The component bottom side can be disposed on the substrate post and adhered to the substrate surface forming an air gap between the component bottom side and the substrate circuit. The substrate post can comprise a substrate post material that is a cured adhesive. Some embodiments comprise a substrate electrode and the component comprises an electrically conductive connection post extending from the component bottom side toward the substrate in electrical contact with the substrate electrode.

    Non-linear tethers for suspended devices

    公开(公告)号:US11637540B2

    公开(公告)日:2023-04-25

    申请号:US16669499

    申请日:2019-10-30

    IPC分类号: H03H9/02 H03H3/02

    摘要: A suspended device structure comprises a substrate, a cavity disposed in a surface of the substrate, and a device suspended entirely over a bottom of the cavity. The device is a piezoelectric device and is suspended at least by a tether that physically connects the device to the substrate. The tether has a non-linear centerline. A wafer can comprise a plurality of suspended device structures.

    MICRO-DEVICE STRUCTURES WITH ETCH HOLES

    公开(公告)号:US20220112078A1

    公开(公告)日:2022-04-14

    申请号:US17066448

    申请日:2020-10-08

    发明人: Pierluigi Rubino

    IPC分类号: B81C1/00

    摘要: A micro-device structure comprises a source substrate having a sacrificial layer comprising a sacrificial portion adjacent to an anchor portion, a micro-device disposed completely over the sacrificial portion, the micro-device having a top side opposite the sacrificial portion and a bottom side adjacent to the sacrificial portion and comprising an etch hole that extends through the micro-device from the top side to the bottom side, and a tether that physically connects the micro-device to the anchor portion. A micro-device structure comprises a micro-device disposed on a target substrate. Micro-devices can be any one or more of an antenna, a micro-heater, a power device, a MEMs device, and a micro-fluidic reservoir.

    HYBRID DOCUMENTS WITH ELECTRONIC INDICIA

    公开(公告)号:US20210342659A1

    公开(公告)日:2021-11-04

    申请号:US16865257

    申请日:2020-05-01

    摘要: A hybrid document includes a flexible document having visible markings. One or more light-controlling elements and a controller are embedded in or on the flexible document. The controller is electrically connected to the one or more light-controlling elements to control the one or more light-controlling elements. A power input connection is electrically connected to the controller, or one or more light-controlling elements, or both. A power source can be connected to the power input connection, for example a piezoelectric or photovoltaic power source. In response to applied power, the controller causes the one or more light-controlling elements to emit light. In some embodiments, the controller includes a memory and a value can be stored in the memory and displayed by the light-controlling element(s). In some embodiments, the value can be assigned or varied by a hybrid currency teller machine.

    Monolithic multi-FETs
    10.
    发明授权

    公开(公告)号:US11152395B1

    公开(公告)日:2021-10-19

    申请号:US17096688

    申请日:2020-11-12

    摘要: A monolithic multi-FET transistor comprises an epitaxial layer disposed on a dielectric layer. The epitaxial layer comprises a crystalline semiconductor material and a multi-FET area. An isolation structure surrounds the multi-FET area and divides the multi-FET area into separate FET portions. A gate disposed on a gate dielectric extends over each FET portion. A source and a drain are each disposed on opposite sides of the gate on the epitaxial layer within each FET portion. Each gate, source, and drain comprise a separate electrical conductor and the gate, source, drain, and epitaxial layer within each FET portion form a field-effect transistor. Gate, source, and drain contacts electrically connect the gates, sources, and drains of the separate FET portions, respectively. At least the sources or drains of two neighboring FET portions are disposed in common over at least a portion of the isolation structure dividing the two neighboring FET portions.