- 专利标题: Multi-beam writing method and multi-beam writing apparatus
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申请号: US16929395申请日: 2020-07-15
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公开(公告)号: US11869746B2公开(公告)日: 2024-01-09
- 发明人: Hiroshi Matsumoto , Yasuo Kato
- 申请人: NuFlare Technology, Inc.
- 申请人地址: JP Yokohama
- 专利权人: NuFlare Technology, Inc.
- 当前专利权人: NuFlare Technology, Inc.
- 当前专利权人地址: JP Yokohama
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP 19137074 2019.07.25
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H01J37/304
摘要:
In one embodiment, a multi-beam writing method is for irradiating each of pixels defined on a substrate, placed on a stage, with each beam of a multi-beam to form a pattern. The method includes obtaining a position correction amount of the pattern by each of a plurality of sub-arrays into which an array of the multi-beam is divided at least in a predetermined direction, based on the positional deviation amount of each beam of each of the sub-arrays, which obtained by dividing an array of the multi-beam at least in the predetermined direction, calculating an dose of the each beam irradiated to each pixel for shifting the position of the pattern drawn for each of the sub-arrays based on the position correction, and performing multi-writing using at least a portion of each two or more of the sub-arrays with the calculated dose.
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