Invention Grant
- Patent Title: Bulk acoustic wave resonator filters with integrated capacitors
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Application No.: US17110675Application Date: 2020-12-03
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Publication No.: US11870422B2Publication Date: 2024-01-09
- Inventor: Saurabh Gupta , Zhiqiang Bi , Emad Mehdizadeh , Dae Ho Kim , Pinal Patel
- Applicant: Akoustis, Inc.
- Applicant Address: US NC Huntersville
- Assignee: Akoustis, Inc.
- Current Assignee: Akoustis, Inc.
- Current Assignee Address: US NC Huntersville
- Agency: Stanek Lemon Crouse & Meeks, P.A.
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H3/02

Abstract:
A device includes a piezoelectric layer on a substrate and including a portion included in an acoustic resonator, a first conductive layer on the piezoelectric layer and including a first electrode of the acoustic resonator on a first side of resonator portion of the piezoelectric layer, and a second conductive layer on the piezoelectric layer and including a second electrode of the acoustic resonator on a second side of the resonator portion of the piezoelectric layer. An insulating layer is disposed on the second conductive layer and an interconnection metal layer is electrically connected to the second conductive layer or the first conductive layer and has a portion extending onto the insulating layer and overlapping a portion of the second conductive layer to provide a capacitor electrode of a capacitor coupled to the first electrode and/or the second electrode.
Public/Granted literature
- US20220182039A1 BULK ACOUSTIC WAVE RESONATOR FILTERS WITH INTEGRATED CAPACITORS Public/Granted day:2022-06-09
Information query
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