Invention Grant
- Patent Title: Memory arrays comprising strings of memory cells and methods used in forming a memory array comprising strings of memory cells
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Application No.: US17590052Application Date: 2022-02-01
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Publication No.: US11871566B2Publication Date: 2024-01-09
- Inventor: Collin Howder , Chet E. Carter
- Applicant: Lodestar Licensing Group, LLC
- Applicant Address: US IL Evanston
- Assignee: Lodestar Licensing Group, LLC
- Current Assignee: Lodestar Licensing Group, LLC
- Current Assignee Address: US IL Evanston
- Agency: Brooks, Cameron & Huebsch, PLLC
- The original application number of the division: US16787914 2020.02.11
- Main IPC: H10B41/27
- IPC: H10B41/27 ; H10B41/10 ; H10B43/10 ; H10B43/27

Abstract:
A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers above a substrate. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. Catalytic material is formed in a bottom region of individual of the trenches. Metal material is electrolessly deposited onto a catalytic surface of the catalytic material to individually fill at least a majority of remaining volume of the individual trenches. Channel-material strings are formed and extend through the first tiers and the second tiers. Other embodiments, including structure independent of method, are disclosed.
Public/Granted literature
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