Invention Grant
- Patent Title: Ion implantation to modify glass locally for optical devices
-
Application No.: US17655849Application Date: 2022-03-22
-
Publication No.: US11873554B2Publication Date: 2024-01-16
- Inventor: Nai-Wen Pi , Jinxin Fu , Kang Luo , Ludovic Godet
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: C23C14/48
- IPC: C23C14/48 ; C23C14/02 ; C23C14/00 ; C03C23/00 ; C23C14/58 ; G02B6/10

Abstract:
Embodiments described herein provide for optical devices with methods of forming optical device substrates having at least one area of increased refractive index or scratch resistance. One method includes disposing an etch material on a discrete area of an optical device substrate or an optical device layer, disposing a diffusion material in the discrete area, and removing excess diffusion material to form an optical material in the optical device substrate or the optical device layer having a refractive index greater than or equal to 2.0 or a hardness greater than or equal to 5.5 Mohs.
Public/Granted literature
- US20220307127A1 ION IMPLANTATION TO MODIFY GLASS LOCALLY FOR OPTICAL DEVICES Public/Granted day:2022-09-29
Information query
IPC分类: