Invention Grant
- Patent Title: Three-dimensional memory device including laterally-undulating memory material layers and methods for forming the same
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Application No.: US17192603Application Date: 2021-03-04
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Publication No.: US11877452B2Publication Date: 2024-01-16
- Inventor: Tatsuya Hinoue , Zhixin Cui
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: THE MARBURY LAW GROUP PLLC
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B41/27

Abstract:
A memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, a memory opening vertically extending through the alternating stack, and a memory opening fill structure located in the memory opening and including a vertical semiconductor channel and a memory material layer. A vertical stack of insulating material portions can be provided at levels of the insulating layers to provide a laterally-undulating profile to the memory material layer. Alternatively, a combination of inner insulating spacers and outer insulating spacers can be employed to provide a laterally-undulating profile to the memory material layer.
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