Invention Grant
- Patent Title: Method and systems useful for producing aluminum ions
-
Application No.: US17492089Application Date: 2021-10-01
-
Publication No.: US11881376B2Publication Date: 2024-01-23
- Inventor: Ying Tang , Joe R. Despres , Joseph D. Sweeney , Oleg Byl , Barry Lewis Chambers
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/32 ; H01J37/317
Abstract:
Described are ion implantation devices, systems, and methods, and in particular to an ion source that is useful for generating an aluminum ion beam.
Public/Granted literature
- US20220108863A1 Method and Systems Useful for Producing Aluminum Ions Public/Granted day:2022-04-07
Information query
