Reliable lateral flux capacitor design
Abstract:
A semiconductor device includes an impedance having a first port and a second port located over a semiconductor substrate. The impedance includes at least one metal-insulator-metal (MIM) lateral flux capacitor (LFC) pair. Each LFC pair includes a first LFC connected in series with a second LFC. A terminal of the first LFC is connected to the first port, and a terminal of the second LFC is connected to the second port. Optionally the device further includes circuitry formed over the semiconductor substrate, wherein the circuitry is configured to implement a circuit function in cooperation with the impedance.
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