Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17826380Application Date: 2022-05-27
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Publication No.: US11881519B2Publication Date: 2024-01-23
- Inventor: Nam Gyu Cho , Rak Hwan Kim , Hyeok-Jun Son , Do Sun Lee , Won Keun Chung
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR 20200001796 2020.01.07
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L21/28 ; H01L21/311 ; H01L29/786

Abstract:
A semiconductor device and a method of fabricating a semiconductor device, the device including a fin-type pattern extending in a first direction; a gate electrode extending in a second direction over the fin-type pattern, the second direction being different from the first direction; spacers on sidewalls of the gate electrode; a capping structure on the gate electrode and the spacers, the capping structure including a first capping pattern and a second capping pattern, the second capping pattern being on the first capping pattern; and an interlayer insulating film surrounding sidewalls of each of the spacers and sidewalls of the capping structure, the interlayer insulating film being in contact with the first capping pattern.
Public/Granted literature
- US20220285518A1 SEMICONDUCTOR DEVICE Public/Granted day:2022-09-08
Information query
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