Invention Grant
- Patent Title: Gas supply member with baffle
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Application No.: US17317418Application Date: 2021-05-11
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Publication No.: US11885021B2Publication Date: 2024-01-30
- Inventor: Kartik Shah , Vishwas Kumar Pandey , Kailash Pradhan , Sairaju Tallavarjula , Rene George , Eric Kihara Shono , Philip A. Bottini , Roger Curtis
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Priority: IN 1741027099 2017.07.31
- The original application number of the division: US16049239 2018.07.30
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L21/67 ; C23C14/56 ; C23C16/44

Abstract:
A gas supply member includes a first side opposite a second side and an inner surface defining a first opening extending between the first and second sides. The gas supply member includes a third side orthogonal to the first side, the third side includes a first extension that has a face partially defining the second side, and the first extension includes a first plurality of holes extending through the first extension to the face. The gas supply member includes a fourth side opposite the third side, the fourth side includes a protrusion that has a face partially defining the second side. The gas supply member also includes a baffle disposed adjacent to the inner surface, the baffle includes a first portion extending from the inner surface and a second portion attached to the first portion, and the second portion orthogonal to the first portion and parallel to the third side.
Public/Granted literature
- US20210262093A1 GAS SUPPLY MEMBER WITH BAFFLE Public/Granted day:2021-08-26
Information query
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