Invention Grant
- Patent Title: Electron emitting element and method for manufacturing same
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Application No.: US17912659Application Date: 2021-03-16
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Publication No.: US11887802B2Publication Date: 2024-01-30
- Inventor: Katsuhisa Murakami , Masayoshi Nagao
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Tokyo
- Agency: OSTROLENK FABER LLP
- Priority: JP 20051288 2020.03.23
- International Application: PCT/JP2021/010617 2021.03.16
- International Announcement: WO2021/193237A 2021.09.30
- Date entered country: 2022-09-19
- Main IPC: H01J1/312
- IPC: H01J1/312 ; H01J1/90 ; C23C16/34 ; H01J9/02

Abstract:
Provided in the present disclosure is an electron emitting element 10 including a laminated structure in which a first electrode 1, an electron accelerating layer 6 made of an insulation film, a second electrode 3, and a cover film 7 are laminated in that order, in which the second electrode is an electrode which transmits electrons and emits electrons from a surface thereof, and the cover film is a film which transmits electrons, is a protective film made of a material different from that of the second electrode, and constitutes an electron emission surface 5.
Public/Granted literature
- US20230134647A1 ELECTRON EMITTING ELEMENT AND METHOD FOR MANUFACTURING SAME Public/Granted day:2023-05-04
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