Invention Grant
- Patent Title: Pre-loaded bowl mechanism for providing a symmetric radio frequency return path
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Application No.: US17072790Application Date: 2020-10-16
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Publication No.: US11887884B2Publication Date: 2024-01-30
- Inventor: Ravikumar Patil , Tuan A. Nguyen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/687 ; H01L21/67 ; H01J37/32
Abstract:
Exemplary substrate processing systems may include a body that defines processing and transfer regions. The systems may include a liner atop the body. The systems may include a faceplate atop the liner. The systems may include a support within the body. The support may be vertically translatable between process and transfer positions. The support may include a plate having a heater. The support may include a shaft coupled with the plate. The support may include a bowl about the shaft below the plate. The bowl may be in alignment with the liner. The support may include springs that push the bowl upward as the support translates to the process position. The support may include straps that couple the plate and bowl. The support may include a hard stop. The bowl may contact the liner in the process position and may be spaced apart from the liner in the transfer position.
Public/Granted literature
- US20220122879A1 PRE-LOADED BOWL MECHANISM FOR PROVIDING A SYMMETRIC RADIO FREQUENCY RETURN PATH Public/Granted day:2022-04-21
Information query
IPC分类:
