Invention Grant
- Patent Title: Vibration element, physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle
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Application No.: US18081084Application Date: 2022-12-14
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Publication No.: US11888464B2Publication Date: 2024-01-30
- Inventor: Seiichiro Ogura , Keiichi Yamaguchi , Masahiro Oshio , Takashi Yamazaki
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP 18009173 2018.01.23
- Main IPC: H03H9/21
- IPC: H03H9/21 ; H03H3/02 ; H03H9/05 ; G01C19/5607 ; H03H3/04 ; H03H9/10 ; G01C19/5621 ; G01C19/5628 ; G01C19/5663 ; G01C19/5656

Abstract:
A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.
Public/Granted literature
Information query
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