-
公开(公告)号：US20240333243A1
公开(公告)日：2024-10-03
申请号：US18618488
申请日：2024-03-27
CPC分类号： H03H3/02 , H03H9/1021 , H03H9/132 , H03H9/19 , H03H2003/022
摘要： A method of manufacturing a resonator element including a substrate having a thin-wall part and a thick-wall part, and an electrode part having an excitation electrode arranged in an excitation electrode placement area of the thin-wall part, a pad electrode arranged in a pad electrode placement area of the thick-wall part, and an extraction electrode which is configured to couple the excitation electrode and the pad electrode to each other, and which is arranged in an extraction electrode placement area of the substrate, includes a metal layer formation step of forming a metal layer on the substrate, a protective film formation step of forming a protective film in an area overlapping at least a part of the extraction electrode placement area in a plan view on the metal layer, and a metal layer etching step of etching the metal layer arranged in the excitation electrode placement area via the protective film to thereby reduce a wall thickness of the metal layer.
-
公开(公告)号：US12088277B2
公开(公告)日：2024-09-10
申请号：US17322948
申请日：2021-05-18
摘要： A vibration device includes a quartz substrate including a first vibration section, a second vibration section, and a third vibration section, a pair of first excitation electrodes formed at two principal surfaces of the quartz substrate, a pair of second excitation electrodes so formed as to sandwich the second vibration section in the thickness direction of the quartz substrate, and a pair of third excitation electrodes so formed as to sandwich the third vibration section in the thickness direction of the quartz substrate. At least one of the pair of second excitation electrodes is formed at a first inclining surface that inclines with respect to the two principal surfaces. At least one of the pair of third excitation electrodes is formed at a second inclining surface that inclines with respect to the two principal surfaces. The second inclining surface inclines with respect to the first inclining surface.
-
公开(公告)号：US11940275B2
公开(公告)日：2024-03-26
申请号：US17718418
申请日：2022-04-12
IPC分类号： G01C19/5642 , B60R16/023 , G01C19/56 , G01C19/5607 , G01C19/5656 , G01P15/18
CPC分类号： G01C19/5642 , B60R16/023 , G01C19/56 , G01C19/5607 , G01C19/5656 , G01P15/18
摘要： A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.
-
公开(公告)号：US11555702B2
公开(公告)日：2023-01-17
申请号：US16744328
申请日：2020-01-16
IPC分类号： G01C19/5621 , B81C1/00
摘要： A gyro vibrating element includes a drive signal pattern including a drive signal electrode to which a drive signal is applied and a drive signal wire connected to the drive signal electrode, a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern, and a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern. Any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.
-
公开(公告)号：US11181371B2
公开(公告)日：2021-11-23
申请号：US16813807
申请日：2020-03-10
IPC分类号： G01C19/5733
摘要： A vibrator device includes a base, a relay substrate supported by the base, and a vibrating element supported by the relay substrate, the relay substrate includes a base mount that is directly or indirectly fixed to the base, a vibrating element mount on which the vibrating element is mounted, and a beam that couples the base mount and the vibrating element mount, and parts of the vibrating element mount that are coupled to the vibrating element are positioned on both sides of the base mount while interposing the base mount therebetween in a plan view.
-
公开(公告)号：US11085765B2
公开(公告)日：2021-08-10
申请号：US16367785
申请日：2019-03-28
发明人： Shogo Sasaki , Masashi Shimura , Keiichi Yamaguchi , Masahiro Oshio , Ryuta Nishizawa , Seiichiro Ogura
IPC分类号： G01C19/5663 , B23K26/38 , G01C19/5656
摘要： A frequency adjustment method of a vibration element includes adjusting a resonance frequency of the vibration element by irradiating the vibration element, which includes a vibrating arm having a first principal surface and a second principal surface that are in a front and back relationship with each other with an energy ray, to remove a part of the vibrating arm on the first principal surface, and in which an activation amount by the energy ray on the second principal surface of the vibrating arm is smaller than an activation amount by the energy ray on the first principal surface of the vibrating arm.
-
公开(公告)号：US20210231438A1
公开(公告)日：2021-07-29
申请号：US17155418
申请日：2021-01-22
IPC分类号： G01C19/5628 , H03H9/21
摘要： A vibrator device includes a vibrating body having a first surface, a package having a second surface opposed to the first surface of the vibrating body, a circuit board provided to the package so as to be opposed to the first surface of the vibrating body, a plurality of coupling electrodes provided to the first surface of the vibrating body, a first coupling line provided to the second surface of the package, a second coupling line provided to the circuit board, and a bonding material electrically coupling the coupling electrode and the first coupling line to each other, wherein the vibrating body has a protrusion protruding toward the package farther than the coupling electrode at the first surface side, and the protrusion has contact with the second surface of the package.
-
公开(公告)号：US09874484B2
公开(公告)日：2018-01-23
申请号：US14665293
申请日：2015-03-23
IPC分类号： H01L41/107 , G01L1/16 , G01L1/10 , H01L41/09
CPC分类号： G01L1/162 , G01C19/5607 , G01C19/5614 , G01C19/5621 , G01L1/106 , H01L41/094
摘要： A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.
-
公开(公告)号：US20170102239A1
公开(公告)日：2017-04-13
申请号：US15388001
申请日：2016-12-22
IPC分类号： G01C19/5628 , B81B3/00
CPC分类号： G01C19/5628 , B81B3/0086 , B81B2201/0242 , B81B2207/012 , B81B2207/07 , H01L2224/48091 , H01L2924/16195 , H01L2924/00014
摘要： An electronic device includes a vibration element having a detection signal electrode and a drive signal electrode, an IC disposed so as to be opposed to the vibration element, a first wiring pattern located between the IC and the vibration element, and electrically connected to the drive signal electrode, and a shield wiring pattern located on the vibration element side of the first wiring pattern, and electrically connected to a constant potential (ground).
-
公开(公告)号：US09568313B2
公开(公告)日：2017-02-14
申请号：US14886591
申请日：2015-10-19
IPC分类号： H01L29/84 , H01L31/0203 , H01L23/20 , H01L21/00 , G01C19/5628
CPC分类号： G01C19/5628 , B81B3/0086 , B81B2201/0242 , B81B2207/012 , B81B2207/07 , H01L2224/48091 , H01L2924/16195 , H01L2924/00014
摘要： An electronic device includes a vibration element having a detection signal electrode and a drive signal electrode, an IC disposed so as to be opposed to the vibration element, a first wiring pattern located between the IC and the vibration element, and electrically connected to the drive signal electrode, and a shield wiring pattern located on the vibration element side of the first wiring pattern, and electrically connected to a constant potential (ground).
摘要翻译： 一种电子设备包括具有检测信号电极和驱动信号电极的振动元件，与振动元件相对设置的IC，位于IC和振动元件之间的电连接到驱动器 信号电极和位于第一布线图案的振动元件侧的屏蔽布线图案，并且电连接到恒定电位（接地）。
-
-
-
-
-
-
-
-
-
搜索结果
53 条记录 (耗时 0.027 秒)
