Invention Grant
- Patent Title: Semiconductor device and method of forming semiconductor package with RF antenna interposer having high dielectric encapsulation
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Application No.: US17447336Application Date: 2021-09-10
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Publication No.: US11894314B2Publication Date: 2024-02-06
- Inventor: HunTeak Lee , Gwang Kim , Junho Ye , YouJoung Choi , MinKyung Kim , Yongwoo Lee , Namgu Kim
- Applicant: STATS ChipPAC Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: PATENT LAW GROUP: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/552 ; H01L23/31 ; H01Q1/40 ; H01L23/498 ; H01L21/56

Abstract:
A semiconductor device has a substrate and an electrical component disposed over a surface of the substrate. An antenna interposer is disposed over the substrate. A first encapsulant is deposited around the antenna interposer. The first encapsulant has a high dielectric constant. The antenna interposer has a conductive layer operating as an antenna and an insulating layer having a low dielectric constant less than the high dielectric constant of the first encapsulant. The antenna interposer is made from an antenna substrate having a plurality of antenna interposers. Bumps are formed over the antenna substrate and the antenna substrate is singulated to make the plurality of antenna interposers. A second encapsulant is deposited over the electrical component. The second encapsulant has a low dielectric constant less than the high dielectric constant of the first encapsulant. A shielding layer is disposed over the second encapsulant.
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