Invention Grant
- Patent Title: SRAM device including oxide semiconductor
-
Application No.: US17529817Application Date: 2021-11-18
-
Publication No.: US11895817B2Publication Date: 2024-02-06
- Inventor: Sung Haeng Cho , Byung-Do Yang , Sooji Nam , Jaehyun Moon , Jae-Eun Pi , Jae-Min Kim
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: NSIP Law
- Priority: KR 20210126685 2021.09.24
- Main IPC: H10B10/00
- IPC: H10B10/00 ; G11C11/417 ; G11C11/412

Abstract:
Provided is a static random-access memory (SRAM) device. The SRAM device includes a substrate including a PMOS area, a circuit wiring structure including an insulating layer and a wiring layer alternately stacked on the substrate, wherein the circuit wiring structure includes a first NMOS area and a second NMOS area vertically separated from the PMOS area with the first NMOS area therebetween, a first transistor including a first gate electrode disposed on the PMOS area, source/drain areas formed on the PMOS area on both sides of the first gate electrode, and a first channel connecting the source and drain areas to each other, a second transistor including a second gate electrode disposed in the first NMOS area and a second channel vertically overlapping the second gate electrode, and a third transistor including a third gate electrode disposed in the second NMOS area and a third channel vertically overlapping the third gate electrode, wherein the first channel includes silicon, wherein the second channel and the third channel include an oxide semiconductor.
Public/Granted literature
- US20230102625A1 SRAM DEVICE INCLUDING OXIDE SEMICONDUCTOR Public/Granted day:2023-03-30
Information query