- 专利标题: Method of manufacturing memory device having word line with improved adhesion between work function member and conductive layer
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申请号: US17578918申请日: 2022-01-19
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公开(公告)号: US11895820B2公开(公告)日: 2024-02-06
- 发明人: Yueh Hsu , Wei-Tong Chen
- 申请人: NANYA TECHNOLOGY CORPORATION
- 申请人地址: TW New Taipei
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW New Taipei
- 代理机构: Muncy, Geissler, Olds & Lowe, P.C.
- 主分类号: H10B12/00
- IPC分类号: H10B12/00
摘要:
The present application provides a method of manufacturing a memory device having a word line (WL) with improved adhesion between a work function member and a conductive layer. The method includes steps of providing a semiconductor substrate defined with an active area and including an isolation structure surrounding the active area; forming a recess extending into the semiconductor substrate and across the active area; forming a first insulating layer conformal to the recess; disposing a first conductive material conformal to the first insulating layer; forming a conductive member surrounded by the first conductive material; disposing a second conductive material over the conductive member and removing a portion of the first conductive material above the second conductive material to form a conductive layer enclosing the conductive member; and forming a second insulating layer over the conductive layer and conformal to the first insulating layer.
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