Invention Grant
- Patent Title: Laser device and dehumidification management method for laser device
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Application No.: US17103021Application Date: 2020-11-24
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Publication No.: US11896929B2Publication Date: 2024-02-13
- Inventor: Makoto Ryudo , Masatoshi Nishio , Jingbo Wang
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP 18124853 2018.06.29
- Main IPC: B01D53/04
- IPC: B01D53/04 ; H01S5/06 ; B01D53/26 ; H01S5/068 ; H01S5/024

Abstract:
A laser device includes a laser oscillator, a dehumidifier, and a controller controlling an operation of the dehumidifier. The controller controls the dehumidifier such that the dew point inside the laser oscillator is lower than the first dew point when a monolayer or less of water molecules is adsorbed, or such that the dew point is equal to or higher than the second dew point when more than a monolayer of water molecules is adsorbed inside the laser oscillator, and is lower than the third dew point at which the dew condensation starts to occur inside the laser oscillator.
Public/Granted literature
- US20210077946A1 LASER DEVICE AND DEHUMIDIFICATION MANAGEMENT METHOD FOR LASER DEVICE Public/Granted day:2021-03-18
Information query
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