Invention Grant
- Patent Title: Imprinting method and imprinting apparatus
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Application No.: US16807606Application Date: 2020-03-03
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Publication No.: US11899360B2Publication Date: 2024-02-13
- Inventor: Masaki Mitsuyasu , Kazuya Fukuhara
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JP 19163362 2019.09.06
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H01L21/027

Abstract:
An imprinting method includes placing a template onto non-solidified resin that is applied onto a surface of a substrate, such that the non-solidified resin extends into a pattern of the template in a surface direction of the substrate, starting first alignment operation to align the template with the substrate using a first alignment mark at a first timing, and starting a second alignment operation to align the template with the substrate using a second alignment mark at a second timing after the first timing. The first timing is when the non-solidified resin has extended into the first alignment mark and not yet into the second alignment mark. The second timing is when the non-solidified resin has extended into the first and second alignment marks.
Public/Granted literature
- US20210072638A1 IMPRINTING METHOD AND IMPRINTING APPARATUS Public/Granted day:2021-03-11
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