Invention Grant
- Patent Title: Plasma processing apparatus and measurement method
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Application No.: US16953808Application Date: 2020-11-20
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Publication No.: US11908665B2Publication Date: 2024-02-20
- Inventor: Chishio Koshimizu , Manabu Iwata
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP 19215428 2019.11.28
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67 ; H05H1/46 ; H01L21/683

Abstract:
A disclosed plasma processing apparatus includes a chamber, a substrate support, an electric path, and a measuring device. The substrate support is accommodated in the chamber. The electric path is coupled to or capacitively coupled to an edge ring on the substrate support. The measuring device measures an electrical characteristic value of the edge ring with a voltage applied to the edge ring on the substrate support through the electric path. The electrical characteristic value measured by the measuring device is variable in accordance with a thickness of the edge ring.
Public/Granted literature
- US20210166920A1 PLASMA PROCESSING APPARATUS AND MEASUREMENT METHOD Public/Granted day:2021-06-03
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