- 专利标题: Embedded heater in a phase change memory material
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申请号: US17172118申请日: 2021-02-10
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公开(公告)号: US11910731B2公开(公告)日: 2024-02-20
- 发明人: Jin Ping Han , Philip Joseph Oldiges , Robert L. Bruce , Ching-Tzu Chen
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Edward J. Wixted, III
- 主分类号: H10N70/20
- IPC分类号: H10N70/20 ; H10B63/00 ; H10N70/00
摘要:
A phase change memory cell for a semiconductor device that includes a heater element on a first conductive layer with a spacer surrounding sides of the heater element. The phase change memory cell includes a first dielectric layer on the conductive layer and on a bottom portion of the spacer surrounding the heater element and a second dielectric layer on the first dielectric layer surrounding a top portion of the heater element. The phase change memory cell includes a phase change material on a top surface of the heater element and on the second dielectric material.
公开/授权文献
- US20220254995A1 EMBEDDED HEATER IN A PHASE CHANGE MEMORY MATERIAL 公开/授权日:2022-08-11
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