- 专利标题: Method for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer
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申请号: US16957064申请日: 2018-12-21
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公开(公告)号: US11938515B2公开(公告)日: 2024-03-26
- 发明人: Fabian Goericke , Stefon Shelton , Benedict Costello
- 申请人: InvenSense, Inc.
- 申请人地址: US CA San Jose
- 专利权人: InvenSense, Inc.
- 当前专利权人: InvenSense, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: DLA Piper LLP (US)
- 国际申请: PCT/US2018/067260 2018.12.21
- 国际公布: WO2019/126729A 2019.06.27
- 进入国家日期: 2020-06-22
- 主分类号: B06B1/06
- IPC分类号: B06B1/06 ; H10N30/04
摘要:
The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.
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