- 专利标题: Selecting a representative subset of potential defects to improve defect classifier training and estimation of expected defects of interest
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申请号: US17829593申请日: 2022-06-01
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公开(公告)号: US11940390B2公开(公告)日: 2024-03-26
- 发明人: Yotam Sofer , Shaul Engler , Boaz Cohen , Saar Shabtay , Amir Bar , Marcelo Gabriel Bacher
- 申请人: Applied Materials Israel Ltd.
- 申请人地址: IL Rehovot
- 专利权人: Applied Materials Israel Ltd.
- 当前专利权人: Applied Materials Israel Ltd.
- 当前专利权人地址: IL Rehovot
- 代理机构: Lowenstein Sandler LLP
- 主分类号: G01N21/88
- IPC分类号: G01N21/88 ; G06F18/00 ; G06F30/27 ; G06V10/70 ; G06V10/98 ; G06V20/69
摘要:
A system, method and computer readable medium for examining a specimen, the method comprising: obtaining defects of interest (DOIs) and false alarms (FAs) from a review subset selected from a group of potential defects received from an inspection tool, each potential defect is associated with attribute values defining a location of the potential defect in an attribute space; generating a representative subset of the group, comprising potential defects selected in accordance with a distribution of the potential defects within the attribute space, and indicating the potential defects in the representative subset as FA; and training a classifier using data informative of the attribute values of the DOIs, the potential defects of the representative subset, and respective indications thereof as DOIs or FAs, wherein the trained classifier is to be applied to at least some of the potential defects to obtain an estimation of a number of expected DOIs.
公开/授权文献
- US20220291138A1 METHOD OF EXAMINING SPECIMENS AND SYSTEM THEREOF 公开/授权日:2022-09-15
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