- 专利标题: Methods of forming FinFET devices
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申请号: US17963196申请日: 2022-10-11
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公开(公告)号: US11955528B2公开(公告)日: 2024-04-09
- 发明人: Hsin-Yi Lee , Cheng-Lung Hung , Weng Chang , Chi-On Chui
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 分案原申请号: US16741767 2020.01.14
- 主分类号: H01L29/49
- IPC分类号: H01L29/49 ; H01L21/28 ; H01L21/285 ; H01L21/8238 ; H01L27/092 ; H01L29/06 ; H01L29/51 ; H01L29/66 ; H01L29/78
摘要:
Semiconductor devices, FinFET devices and methods of forming the same are disclosed. One of the semiconductor devices includes a substrate and a gate strip disposed over the substrate. The gate strip includes a high-k layer disposed over the substrate, an N-type work function metal layer disposed over the high-k layer, and a barrier layer disposed over the N-type work function metal layer. The barrier layer includes at least one first film containing TiAlN, TaAlN or AlN.
公开/授权文献
- US20230032727A1 METHODS OF FORMING FINFET DEVICES 公开/授权日:2023-02-02
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