- 专利标题: Joint opening structures of three-dimensional memory devices and methods for forming the same
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申请号: US17934161申请日: 2022-09-21
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公开(公告)号: US11956953B2公开(公告)日: 2024-04-09
- 发明人: Zhenyu Lu , Wenguang Shi , Guanping Wu , Feng Pan , Xianjin Wan , Baoyou Chen
- 申请人: Yangtze Memory Technologies Co., Ltd.
- 申请人地址: CN Hubei
- 专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人地址: CN Hubei
- 代理机构: Sterne, Kessler, Goldstein Fox P.L.L.C.
- 优先权: CN 1710134782.1 2017.03.08 CN 1710134783.6 2017.03.08
- 主分类号: H10B43/00
- IPC分类号: H10B43/00 ; H10B43/10 ; H10B43/20 ; H10B43/27 ; H10B43/35
摘要:
Joint opening structures of 3D memory devices and fabricating method are provided. A joint opening structure comprises a first through hole penetrating a first stacked layer and a first insulating connection layer, a first channel structure at the bottom of the first through hole, a first functional layer on the sidewall of the first through hole, a second channel structure on the sidewall of the first functional layer, a third channel structure over the first through hole, a second stacked layer on the third channel structure, a second insulating connection layer on the second stacked layer, a second through hole penetrating the second stacked layer and the second insulating connection layer, a second functional layer disposed on the sidewall of the second through hole, a fourth channel structure on the sidewall of the second functional layer, and a fifth channel structure over the second through hole.
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