- 专利标题: Negative capacitance transistor with external ferroelectric structure
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申请号: US17572267申请日: 2022-01-10
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公开(公告)号: US11961897B2公开(公告)日: 2024-04-16
- 发明人: Chi-Hsing Hsu , Sai-Hooi Yeong , Ching-Wei Tsai , Kuan-Lun Cheng , Chih-Hao Wang , Min Cao
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: HAYNES AND BOONE, LLP
- 分案原申请号: US16572341 2019.09.16
- 主分类号: H01L29/51
- IPC分类号: H01L29/51 ; H01L21/02 ; H01L21/8238 ; H01L27/092 ; H01L29/06
摘要:
A first fin structure is disposed over a substrate. The first fin structure contains a semiconductor material. A gate dielectric layer is disposed over upper and side surfaces of the first fin structure. A gate electrode layer is formed over the gate dielectric layer. A second fin structure is disposed over the substrate. The second fin structure is physically separated from the first fin structure and contains a ferroelectric material. The second fin structure is electrically coupled to the gate electrode layer.
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